AirCool® PRIME

Newest innovation in thermal testing

  • Industry’s lowest soaking time
  • Ultra low noise
  • Fast transition times
  • PRIME Thermo Shield (PTS)
  • Highest flexibility with modular surface design

Description

ERS’ newest innovation in thermal testing, is a family of thermal chucks developed together with MPI Corporation, a highly distinguished company in the analytical wafer probing industry.

Key features of PRIME:

  • Industry’s lowest soaking time
  • Ultra low noise
  • Fast transition times
  • PRIME Thermo Shield (PTS)
  • Reaching -10°C with NO chiller
  • Highest flexibility with modular surface design

This is the 4th generation of thermal chucks from ERS, with a temperature ranging from -60 to 300°C. For test temperatures down to -10°C, no separate chiller is necessary, and for -40º°C only a small chiller is needed (only 1/3 of the size of a normal ERS chiller).
The PRIME Thermo Shield (PTS) is integrated into the chuck, leading to an estimated 2/3 reduction in soaking times compared to previous ERS models.

Available for 300mm (12″) wafers.

AirCool® PRIME won an Electronics Industry Award in the category “Test, Measurement & Inspection Product of the Year”.

TECHNICAL DATA

Available upper temperature limits
+150°C up to +300°C
Available lower temperature limits
+35, +20, 0, -20, - 40, - 55, - 65 °C
Coolant
Air (user supplied)
Chuck Temperature Display Resolution
0.01°C
Smallest Temperature Selection Step
0.1°C
Temperature accuracy
±0.08 °C
Max. voltage between chuck top and GND
500 V DC (high voltage option up to 10 kV available)
Surface flatness and base parallelism
-65 °C up to +300 °C < ±10µm (tighter range on request)
Temperature uniformity
-65 °C to +200 °C < ±0.5 °C
> 200 °C < ±0.5 %
Electrical Isolation STD
> 5 T Ohm at +25 °C
Temperature sensor
Pt100 1/3DIN, 4-line wired
Chuck surface plating
Nickel (gold or non-conductive available)
Interfaces
RS232C, Ethernet, others on request
Control method
Low noise DC/PID with Temperature Dynamic Control TDC
Heating rates for 300 mm system
-65°C to +25°C:  10 min
0 °C to +25°C:  4 min
+25 °C to +150 °C: 10 min
+25 °C to +200 °C:  15 min
+25 °C to +300 °C:  25 min
Cooling Rates for 300 mm system
+150 °C to +25 °C: 20 min
+200 °C to +25 °C: 25 min
+300 °C to +25 °C: 30 min
+25 °C to 0 °C: 10 min
+25 °C to -65 °C: 40 min
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