ERS’ newest innovation in thermal testing, is a family of thermal chucks developed together with MPI Corporation, a highly distinguished company in the analytical wafer probing industry.
Key features of PRIME:
- Industry’s lowest soaking time
- Ultra low noise
- Fast transition times
- PRIME Thermo Shield (PTS)
- Reaching -10°C with NO chiller
- Highest flexibility with modular surface design
This is the 4th generation of thermal chucks from ERS, with a temperature ranging from -60 to 300°C. For test temperatures down to -10°C, no separate chiller is necessary, and for -40º°C only a small chiller is needed (only 1/3 of the size of a normal ERS chiller).
The PRIME Thermo Shield (PTS) is integrated into the chuck, leading to an estimated 2/3 reduction in soaking times compared to previous ERS models.
Available for 300 mm (12″) and 200 mm (8″) wafers*.
AirCool® PRIME won an Electronics Industry Award in the category “Test, Measurement & Inspection Product of the Year”.
> 200 °C < ±0.5 %
0 °C to +25°C: 4 min
+25 °C to +150 °C: 10 min
+25 °C to +200 °C: 15 min
+25 °C to +300 °C: 25 min
+200 °C to +25 °C: 25 min
+300 °C to +25 °C: 30 min
+25 °C to 0 °C: 10 min
+25 °C to -65 °C: 40 min
For special requirements, please contact us.