Correct Warpage up to 90%

ERS’s patented Warpage Correction System delivers industry-leading Warpage Correction performance with high temperature uniformity chucks, enabling stable handling of the thinnest wafers and panels while keeping higher throughput.

• Correct warpage up to 90%
• High throughput >24 WPH
• Also available for panels up to 650 x 650 mm

ERS is trusted globally by IDMs, foundries, and OSATs for mission-critical wafer and panel processes.