High Thermal Uniformity Chuck System

Fully integrated hot/cold solutions for all major production and laboratory wafer probers.

  • Available in 200 mm and 300 mm wafer format
  • Thermal Uniformity of ±0,1°C
  • Temperature stability of ±0,03°C
  • Temperature display accuracy of ±0,05°C

DESCRIPTION

The AC3 High Thermal Uniformity (HTU) chuck system is a breakthrough device that has introduced High Thermal Uniformity and Accuracy in wafer testing.

It is the ideal tool for the probing of the new generation of temperature-sensitive sensors and high precision analog devices. The HTU’s unparalleled precision in temperature management allows for more accurate sensing values such as gas concentration, humidity, and pressure.

The innovative HTU Aircool© chuck system is available now in both 200mm and 300mm wafer formats. They feature a thermal uniformity lower than ±0,1°C, and a temperature control stability better than ±0,03°C.

By pairing the HTU Chuck with ERS’s Dynamic Thermal Shield (DTS), our customers will be perfectly equipped to manage the environmental temperature variation coming from other supporting elements such as the probe card.

TECHNICAL DATA

Available upper temperature limits
+150°C up to +300°C
Available lower temperature limits
+35, +20, -40, -55 °C
Coolant
Air (user supplied)
Temperature Stability
±0,03°C
Temperature Display Accuracy
0,5mm to 5,0mm
Long Term Stability
≤10mK / year
Max. voltage between chuck top and GND
500 V DC
Surface flatness and base parallelism
-55 °C up to +300 °C < ±12µm (tighter range on request)
Temperature uniformity
-60°C to -20°C ≤±0.5°C
-20°C to 0°C ≤±0.2°C
0° to +90°C ≤±0.1°C
+90°C to +120°C ≤±0.2°C
+120°C to +200°C ≤±0.5°C
≥ 200°C ≤±0.5°C
Electrical Isolation STD
> 2,5 T Ohm at +25°C
Temperature sensor
Pt100 1/10DIN, 4-line wired
Chuck surface plating
Nickel (gold or non-conductive available)
Interfaces
RS232C, Ethernet, others on request
Control method
Low noise DC/PID with Temperature Dynamic Control TDC
Heating rates for 300 mm system
- 55 °C to +25°C:  12 min
- 40 °C to +25°C:  10 min
+25 °C to +150 °C: 20 min
+25 °C to +200 °C:  25 min
+25 °C to +300 °C:  40 min
Cooling Rates for 300 mm system
+150 °C to +25 °C: 25 min
+200 °C to +25 °C: 35 min
+300 °C to +25 °C: 40 min
+25 °C to 0 °C: 15 min
+25 °C to -40 °C: 35 min
+25 °C to -55 °C: 40 min